其奴[soitsu] that person (guy, fellow)
其処[soko] there (place relatively near listener)
其処いら[sokoira] that area
其処ら[sokora] everywhere
其方[sochira] that way (direction distant from the speaker, close to the listener)

其の[sono] that (something or someone distant from the speaker, close to the listener; actions of the listener, or ideas expressed or understood by the listener)
其の上で[sonouede] moreover
其の為[sonotame] hence
其の後[sonoato] after that
其の実[sonojitsu] in fact

それ程[sorehodo] to that degree
程々[hodohodo] moderately
マルコフ過程[marukofukatei] Markov process
音程[ontei] musical interval
課程[katei] course

過程[katei] process
会議日程[kaiginittei] conference program
改革過程[kaikakukatei] reform process
確率過程[kakuritsukatei] stochastic process
規程[kitei] official regulations