彼処[asoko] there (place physically distant from both speaker and listener)
其処[soko] there (place relatively near listener)
其処いら[sokoira] that area
其処ら[sokora] everywhere
其れ処か[soredokoroka] on the contrary

何処其処[dokosoko] such-and-such a place
何処でも[dokodemo] anywhere
データ処理[deetashori] data processing
仮処分[karishobun] temporary measures
何処か[dokoka] somewhere

彼所[asuko] there (place physically distant from both speaker and listener)
其れ所か[soredokoroka] on the contrary
所が[tokoroga] even so
所縁[yukari] related to (some person or place)
ジェット推進研究所[jettosuishinkenkyuusho] Jet Propulsion Laboratory

悪所[akusho] dangerous area
案内所[annaijo] information desk
育種所[ikushujo] (plant) nursery
一所懸命[isshokenmei] very hard
印刷所[insatsujo] press

此方[kochira] this way (direction close to the speaker or towards the speaker)
此方[konata] this way
此間[konaida] the other day
此の間[konokan] the other day
此の頃[konokoro] recently

此度[konotabi] this occasion
此の辺[konohen] this area
此から[korekara] after this
此れまで[koremade] hitherto
此等[korera] these

是等[korera] these
其等[sorera] those (near the second person)
等閑[naozari] neglect
悪平等[akubyoudou] misguided equality
位階勲等[ikaikuntou] court rank and honors

一等[ittou] first-class
１等軍曹[ittougunsou] sergeant first-class
１等国[ittoukoku] first-class power
１等車[ittousha] first-class carriage (coach)
１等賞[ittoushou] first place prize